Publication:

Determination of the model for the chemical structure of porous PECVD low-k films

Date

2015
Journal article
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dc.contributor.authorVerdonck, Patrick
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorDevonport, Joshua
dc.contributor.authorHuanca, Danilo
dc.contributor.authorGomes dos Santos Filho, Sebastiao
dc.contributor.authorConard, Thierry
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-23T00:35:04Z
dc.date.available2021-10-23T00:35:04Z
dc.date.issued2015
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26125
dc.identifier.urlhttp://jss.ecsdl.org/content/4/1/N3140.abstract
dc.source.beginpageN3140
dc.source.endpageN3145
dc.source.issue1
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.volume4
dc.title

Determination of the model for the chemical structure of porous PECVD low-k films

dc.typeJournal article
dspace.entity.typePublication
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