Browsing by author "Maeda, Tatsuya"

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MuGFET Observation and CD measurement by using CD-SEM

Maeda, Tatsuya; Tanaka, Maki; Isawa, Miki; Watanabe, Kenji; Hasegawa, Norio; Sekiguchi, Kohei; Rooyackers, Rita; Collaert, Nadine; Vandeweyer, Tom (2008-02)
Validation of CD-SEM etching residue evaluation technique for MuGFET structures

Isawa, Miki; Tanaka, Maki; Maeda, Tatsuya; Watanabe, Kenji; Vandeweyer, Tom; Collaert, Nadine; Rooyackers, Rita (2009)