MuGFET Observation and CD measurement by using CD-SEM

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Authors
Maeda, Tatsuya; Tanaka, Maki; Isawa, Miki; Watanabe, Kenji; Hasegawa, Norio; Sekiguchi, Kohei; Rooyackers, Rita; Collaert, Nadine; Vandeweyer, Tom
Conference
Metrology, Inspection, and Process Control for Microlithography XXII
Title
MuGFET Observation and CD measurement by using CD-SEM
Publication type
Proceedings paper
Embargo date
9999-12-31
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