Browsing by author "Musschoot, Jan"

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TiO2/HfO2 bi-layer gate stacks grown by atomic layer deposition for germanium-based metal-oxide-semiconductor devices using GeOxNy passivation layer

Xie, Qi; Musschoot, Jan; Schaekers, Marc; Caymax, Matty; Delabie, Annelies; Lin, Dennis; Qu, Xin-Ping; Jiang, Yu-Long; Van den Berghe, Sven; Detavernier, Christophe (2011)