Authors

Xie, Qi; Musschoot, Jan; Schaekers, Marc; Caymax, Matty; Delabie, Annelies; Lin, Dennis; Qu, Xin-Ping; Jiang, Yu-Long; Van den Berghe, Sven; Detavernier, Christophe

ISSN

1099-0062

Issue

5

Journal

Electrochemical and Solid-State Letters

Volume

14

Title

TiO2/HfO2 bi-layer gate stacks grown by atomic layer deposition for germanium-based metal-oxide-semiconductor devices using GeOxNy passivation layer

Publication type

Journal article