Browsing by author "Peters, R.D."

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Line-edge roughness reduction and CD slimming using hardback processing

Peters, R.D.; Lucas, K.; Cobb, J.L.; Parker, C.; Patterson, K.; McCauley, R.; Ercken, Monique; Van Roey, Frieda; Vandenbroeck, Nadia; Pollentier, Ivan (2003)