Line-edge roughness reduction and CD slimming using hardback processing

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Authors
Peters, R.D.; Lucas, K.; Cobb, J.L.; Parker, C.; Patterson, K.; McCauley, R.; Ercken, Monique; Van Roey, Frieda; Vandenbroeck, Nadia; Pollentier, Ivan
Conference
Metrology, Inspection, and Process Control for Microlithography XVII
Title
Line-edge roughness reduction and CD slimming using hardback processing
Publication type
Proceedings paper
Embargo date
9999-12-31
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