Publication:

Line-edge roughness reduction and CD slimming using hardback processing

Date

2003
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorPeters, R.D.
dc.contributor.authorLucas, K.
dc.contributor.authorCobb, J.L.
dc.contributor.authorParker, C.
dc.contributor.authorPatterson, K.
dc.contributor.authorMcCauley, R.
dc.contributor.authorErcken, Monique
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorPollentier, Ivan
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorVan Roey, Frieda
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.accessioned2021-10-15T06:05:50Z
dc.date.available2021-10-15T06:05:50Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7997
dc.source.beginpage1131
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XVII
dc.source.conferencedate24/02/2003
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage1142
dc.title

Line-edge roughness reduction and CD slimming using hardback processing

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
7997.pdf
Size:
3.55 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions