Publication:

Line-edge roughness reduction and CD slimming using hardback processing

Date

2003

Proceedings Paper

Simple item page Full metadata Statistics

Files

7997.pdf 3.55 MB

Author(s)

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Ercken, Monique

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Van Roey, Frieda

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Vandenbroeck, Nadia

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Pollentier, Ivan

Metrics

1878 since deposited on 2021-10-15

Acq. date: 2025-12-10