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Conference contributions
Line-edge roughness reduction and CD slimming using hardback processing
Publication:
Line-edge roughness reduction and CD slimming using hardback processing
Date
2003
Proceedings Paper
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7997.pdf
3.55 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Peters, R.D.
;
Lucas, K.
;
Cobb, J.L.
;
Parker, C.
;
Patterson, K.
;
McCauley, R.
;
Ercken, Monique
;
Van Roey, Frieda
;
Vandenbroeck, Nadia
;
Pollentier, Ivan
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1876
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1876
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations