Browsing by author "Mahne, Nicola"
Now showing items 1-3 of 3
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Evolution of Secondary Electrons Emission During EUV Exposure in Photoresists
Fallica, Roberto; Nannarone, Stefano; Mahne, Nicola; Malvezzi, Andrea Marco; Berti, Andrea; De Simone, Danilo (2021) -
Mean free path of electrons in EUV photoresist in the energy range 20 to 450 eV
Fallica, Roberto; Mahne, Nicola; Conard, Thierry; Vanleenhove, Anja; Nannarone, Stefano (2023) -
Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20-450 eV
Fallica, Roberto; Mahne, Nicola; Conard, Thierry; Vanleenhove, Anja; de Simone, Danilo; Nannarone, Stefano (2023)