Publication:
Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20-450 eV
Loading...
Journal
Abstract
Description
Statistics
Downloads
3 since deposited on 2024-01-23
Acq. date: 2026-02-25
Views
994 since deposited on 2024-01-23
3last month
Acq. date: 2026-02-25
Citations
Statistics
Downloads
3 since deposited on 2024-01-23
Acq. date: 2026-02-25
Views
994 since deposited on 2024-01-23
3last month
Acq. date: 2026-02-25
Citations