Publication:
Mean Free Path of Electrons in Organic Photoresists for Extreme Ultraviolet Lithography in the Kinetic Energy Range 20-450 eV
Loading...
Journal
Abstract
Description
Metrics
Downloads
3 since deposited on 2024-01-23
Acq. date: 2025-10-28
Views
987 since deposited on 2024-01-23
Acq. date: 2025-10-28
Citations
Metrics
Downloads
3 since deposited on 2024-01-23
Acq. date: 2025-10-28
Views
987 since deposited on 2024-01-23
Acq. date: 2025-10-28
Citations