Browsing by author "Haemers, J."

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Texture of atomic layer deposited ruthenium

Musschoot, J.; Xie, Q.; Deduytsche, D.; De Keyser, K.; Longrie, D.; Haemers, J.; Van den Berghe, S.; Van Meirhaeghe, R.L.; D'Haen, Jan; Detavernier, C. (2010)