Browsing by author "Chanson, R."

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Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials

de Marneffe, Jean-Francois; Fujikawa, T.M.; Yamaguchi, T.; Nozawa, S.; Niino, R.; Sato, N.; Chanson, R.; Babaei Gavan, Khashayar; Rezvanov, Askar; Lazzarino, Frederic; Tokei, Zsolt (2018)