Authors

de Marneffe, Jean-Francois; Fujikawa, T.M.; Yamaguchi, T.; Nozawa, S.; Niino, R.; Sato, N.; Chanson, R.; Babaei Gavan, Khashayar; Rezvanov, Askar; Lazzarino, Frederic; Tokei, Zsolt

Conference

AVS 65th Meeting & Exhibition 2018

Title

Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials

Publication type

Meeting abstract

Embargo date

9999-12-31