Publication:
Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials
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2002 since deposited on 2021-10-25
1last month
Acq. date: 2025-12-12
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Views
2002 since deposited on 2021-10-25
1last month
Acq. date: 2025-12-12
Citations