Browsing by author "Vishnevsky, A."

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Investigation of plasma damage of low-k dielectrics during cryogenic etching

Rezvanov, A.; Miakonkikh, A.; Vishnevsky, A.; Gutshin, O.; Gornev, E.; Krasnikov, G.; Mogilnikov, K.; Rudenko, K.; Baklanov, Mikhaïl (2015)