Browsing by author "Mora, J.-M."

Now showing items 1-1 of 1

    • A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS 

      Scheurle, A.; Fuchs, T.; Kehr, K.; Leinenbach, C.; Kronmueller, S.; Arias, A.; Ceballos, J.; Lagos, M.A.; Mora, J.-M.; Munoz, J.M.; Ragel, A.; Ramos, J.; Van Aerde, Steven; Spengler, J.; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Witvrouw, Ann (2007-01)