A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

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Authors
Scheurle, A.; Fuchs, T.; Kehr, K.; Leinenbach, C.; Kronmueller, S.; Arias, A.; Ceballos, J.; Lagos, M.A.; Mora, J.-M.; Munoz, J.M.; Ragel, A.; Ramos, J.; Van Aerde, Steven; Spengler, J.; Mehta, Anshu; Verbist, Agnes; Du Bois, Bert; Witvrouw, Ann
Conference
Proceedings IEEE MEMS
Title
A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS
Publication type
Proceedings paper
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