Publication:

A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

Date

2007
Proceedings Paper
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Author(s)

Scheurle, A.
;
Fuchs, T.
;
Kehr, K.
;
Leinenbach, C.
;
Kronmueller, S.
;
Arias, A.
;
Ceballos, J.
;
Lagos, M.A.
;
Mora, J.-M.
;
Munoz, J.M.
;
Ragel, A.
;
Ramos, J.
;
Van Aerde, Steven  
;
Spengler, J.
;
Mehta, Anshu
;
Verbist, Agnes
;
Du Bois, Bert  
;
Witvrouw, Ann

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2064 since deposited on 2021-10-16
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