Publication:

A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS

Date

2007-01

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

Kronmueller, S.

;

;

;

;

;

;

;

;

Van Aerde, Steven

;

;

;

;

;

Metrics

2057 since deposited on 2021-10-16

2last month

2last week

Acq. date: 2026-01-12