Browsing by author "Yao, H"
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Spin on metal oxide materials for N7 and beyond patterning applications
Mannaert, Geert; Altamirano Sanchez, Efrain; Hopf, Toby; Sebaai, Farid; Lorant, Christophe; Petermann, Claire; Hong, S-E; Mullen, S; Wolfer, E; Mckenzie, D; Yao, H; Rahman, D; Cho, J-Y; Padmanaban, M; Piumi, Daniele (2017)