Browsing by author "Mel'nik, V. P."
Now showing items 1-4 of 4
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Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling
Romanyuk, B. N.; Litovchenko, V. G.; Efremov, A. A.; Mel'nik, V. P.; Claeys, C. (1998) -
Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation
Litovchenko, V. G.; Efremov, A. A.; Romanyuk, B. N.; Mel'nik, V. P.; Claeys, Cor (1998) -
Stimulated buried dielectric phase formation for nanelectronic aims
Litovchenko, V. G.; Romanyuk, B. N.; Efremov, A. A.; Mel'nik, V. P.; Claeys, Cor (1997) -
Use of gettering and defect induced processes in ultra-thin buried oxide synthesis
Litovchenko, V. G.; Efremov, A. A.; Romanuk, B. N.; Mel'nik, V. P.; Claeys, Cor (1997)