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Use of gettering and defect induced processes in ultra-thin buried oxide synthesis
Publication:
Use of gettering and defect induced processes in ultra-thin buried oxide synthesis
Date
1997
Proceedings Paper
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1974.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Litovchenko, V. G.
;
Efremov, A. A.
;
Romanuk, B. N.
;
Mel'nik, V. P.
;
Claeys, Cor
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1944
since deposited on 2021-09-30
442
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1944
since deposited on 2021-09-30
442
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations