Authors

Romanyuk, B. N.; Litovchenko, V. G.; Efremov, A. A.; Mel'nik, V. P.; Claeys, C.

Conference

NATO Advanced Research Workshop on "Perspectives, Sciences and Technologies of Novel Silicon-on-Insulator Devices"; 12-15 Octobe

Title

Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling

Publication type

Oral presentation