Publication:

Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling

Date

1998

Presentation

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Author(s)

Romanyuk, B. N.

;

Litovchenko, V. G.

;

;

;

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1937 since deposited on 2021-10-01

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Acq. date: 2026-05-31