Publication:
Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling
Date
| dc.contributor.author | Romanyuk, B. N. | |
| dc.contributor.author | Litovchenko, V. G. | |
| dc.contributor.author | Efremov, A. A. | |
| dc.contributor.author | Mel'nik, V. P. | |
| dc.contributor.author | Claeys, C. | |
| dc.date.accessioned | 2021-10-01T08:48:48Z | |
| dc.date.available | 2021-10-01T08:48:48Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2911 | |
| dc.source.conference | NATO Advanced Research Workshop on "Perspectives, Sciences and Technologies of Novel Silicon-on-Insulator Devices"; 12-15 Octobe | |
| dc.source.conferencelocation | ||
| dc.title | Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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