Browsing by author "Vanhove, Nico"
Now showing items 1-10 of 10
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Electron beam induced etching of silicon with SF6
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2010) -
Particle emission from chemically enhanced electron-beam-induced etching of Si: An approach for zero-energy secondary-ion mass spectrometry
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2009) -
The integration of EBIE into a SIMS tool: towards quantitative depth profiles with high resolution and a better understanding of the etch mechanisms
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2008) -
Towards quantitative depth profiling with high spatial and high depth resolution
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2008) -
Towards quantitative depth profiling with high spatial and high depth resolution
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2007) -
Zero-energy SIMS depth profiling: the role of surface roughness development with XeF2 based etching
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2011) -
Zero-energy SIMS. Towards quantitative depth profiles with high depth and high spatial resolution
Vanhove, Nico (2011-01) -
Zero-energy SIMS: The role of surface roughness development with XeF2 based etching
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2009) -
Zero-energy SIMS: Towards quantitative depth profiling with high spatial and high depth resolution
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2008) -
Zero-energy SIMS: Towards quantitative depth profiling with high spatial and high depth resolution
Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried (2009)