Authors

Vanhove, Nico; Lievens, Peter; Vandervorst, Wilfried

ISSN

0142-2421

Issue

1_2

Journal

Surface and Interface Analysis

Volume

43

Title

Zero-energy SIMS depth profiling: the role of surface roughness development with XeF2 based etching

Publication type

Journal article

Embargo date

9999-12-31