Browsing by author "Torres, Juan Andres"

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Printability of hard and soft defects in 193-nm lithography

Philipsen, Vicky; Jonckheere, Rik; Kohlpoth, Stephanie; Friedrich, Christoph M.; Torres, Juan Andres (2002)
Understanding design-patterning interactions

Gupta, Puneet; Mallik, Arindam; Torres, Juan Andres (2013)