Printability of hard and soft defects in 193-nm lithography

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Authors
Philipsen, Vicky; Jonckheere, Rik; Kohlpoth, Stephanie; Friedrich, Christoph M.; Torres, Juan Andres
Conference
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Title
Printability of hard and soft defects in 193-nm lithography
Publication type
Proceedings paper
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