Publication:
Printability of hard and soft defects in 193-nm lithography
Date
| dc.contributor.author | Philipsen, Vicky | |
| dc.contributor.author | Jonckheere, Rik | |
| dc.contributor.author | Kohlpoth, Stephanie | |
| dc.contributor.author | Friedrich, Christoph M. | |
| dc.contributor.author | Torres, Juan Andres | |
| dc.contributor.imecauthor | Philipsen, Vicky | |
| dc.contributor.imecauthor | Jonckheere, Rik | |
| dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
| dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
| dc.date.accessioned | 2021-10-14T22:47:29Z | |
| dc.date.available | 2021-10-14T22:47:29Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6719 | |
| dc.source.beginpage | 95 | |
| dc.source.conference | 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents | |
| dc.source.conferencedate | 14/01/2002 | |
| dc.source.conferencelocation | München Germany | |
| dc.source.endpage | 111 | |
| dc.title | Printability of hard and soft defects in 193-nm lithography | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |