Browsing by author "Zschaetzsch Gerd,"

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Optimization of standard As ion implantation for NMOS Si bulk FinFETs extension

Sasaki, Yuichiro; De Keersgieter, An; Chew, Soon Aik; Chiarella, Thomas; Hellings, Geert; Togo Mitsuhiro,; Zschaetzsch Gerd,; Thean, Aaron; Horiguchi, Naoto (2013)