Publication:

Optimization of standard As ion implantation for NMOS Si bulk FinFETs extension

Date

2013

Proceedings Paper

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Files

27096.pdf 1.8 MB

Author(s)

Sasaki, Yuichiro

;

De Keersgieter, An

;

;

Chiarella, Thomas

;

Hellings, Geert

;

Togo Mitsuhiro,

;

Zschaetzsch Gerd,

;

;

Horiguchi, Naoto

Statistics

1953 since deposited on 2021-10-21

Acq. date: 2026-10-12