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Optimization of standard As ion implantation for NMOS Si bulk FinFETs extension
Publication:
Optimization of standard As ion implantation for NMOS Si bulk FinFETs extension
Date
2013
Proceedings Paper
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27096.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sasaki, Yuichiro
;
De Keersgieter, An
;
Chew, Soon Aik
;
Chiarella, Thomas
;
Hellings, Geert
;
Togo Mitsuhiro,
;
Zschaetzsch Gerd,
;
Thean, Aaron
;
Horiguchi, Naoto
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1944
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1944
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations