Browsing by author "Tower, Joshua"

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Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics

Iacopi, Francesca; Brongersma, Sywert; Mazurenko, Alexander; Struyf, Herbert; Mannaert, Geert; Travaly, Youssef; Maznev, Alexey; Abell, Thomas; Tower, Joshua; Maex, Karen (2005-06)