Authors

Iacopi, Francesca; Brongersma, Sywert; Mazurenko, Alexander; Struyf, Herbert; Mannaert, Geert; Travaly, Youssef; Maznev, Alexey; Abell, Thomas; Tower, Joshua; Maex, Karen

Conference

Proceedings IEEE International Interconnects Technology Conference - IITC

Title

Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics

Publication type

Proceedings paper