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Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics
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Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics
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Date
2005-06
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Iacopi, Francesca
;
Brongersma, Sywert
;
Mazurenko, Alexander
;
Struyf, Herbert
;
Mannaert, Geert
;
Travaly, Youssef
;
Maznev, Alexey
;
Abell, Thomas
;
Tower, Joshua
;
Maex, Karen
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1885
since deposited on 2021-10-16
Acq. date: 2026-01-07
Citations
Metrics
Views
1885
since deposited on 2021-10-16
Acq. date: 2026-01-07
Citations