Browsing by author "Kushibiki, Masato"

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Etching of Co-Pd with significantly reduced sidewall re-deposition

Radisic, Dunja; Nishimura, Eiichi; Kushibiki, Masato; Wataru, Shimizu; Tahara, Shigeru; Xu, Kaidong; Kim, Woosik; Boullart, Werner (2013)
LWR reduction by novel lithographic and etch techniques

Kobayashi, Shinji; Shimura, Satoru; Kawasaki, Tetsu; Nafus, Kathleen; Hatakeyama, Shinichi; Shite, Hideo; Nishimura, Eiichi; Kushibiki, Masato; Hara, Arisa; Gronheid, Roel; Vaglio Pret, Alessandro; Kitano, Junichi (2010)