Browsing by author "Garidis, Kostas"

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Mask effects on resist variability in extreme ultraviolet lithography

Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Yan, Pei-Yang; Leeson, Michael; Younkin, Todd; Garidis, Kostas; Biafore, John (2013)
Stochastic limitations for EUV resist kinetics towards the 16nm node

Vaglio Pret, Alessandro; Garidis, Kostas; Gronheid, Roel; Biafore, John (2011)