Mask effects on resist variability in extreme ultraviolet lithography

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Authors

Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Yan, Pei-Yang; Leeson, Michael; Younkin, Todd; Garidis, Kostas; Biafore, John

ISSN

0021-4922

Issue

6

Journal

Japanese Journal of Applied Physics

Volume

52

Title

Mask effects on resist variability in extreme ultraviolet lithography

Publication type

Journal article

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