Browsing by author "Kerkwijk, Bas"

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New CoSi2 SALICIDE technology for 0.1 µm processes and below

Wang, Qingfeng; Maex, Karen; Kubicek, Stefan; Jonckheere, Rik; Kerkwijk, Bas; Verbeeck, Rita; Biesemans, Serge; De Meyer, Kristin (1995)