Publication:
New CoSi2 SALICIDE technology for 0.1 µm processes and below
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1995 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-11
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Metrics
Views
1995 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-11
Citations