Browsing by author "Kosugi, H."
Now showing items 1-3 of 3
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Further investigation of EUV process sensitivities for wafer track processing
Bradon, Neil; Nafus, Kathleen; Shite, Hideo; Kitano, J.; Kosugi, H.; Goethals, Mieke; Cheng, Shaunee; Hermans, Jan; Hendrickx, Eric; Baudemprez, Bart; Van Den Heuvel, Dieter (2010) -
Investigation of EUV process sensitivities for wafer track processing
Bradon, Neil; Weichert, Heiko; Nafus, Kathleen; Hatakeyama, Shinichi; Kitano, J.; Kosugi, H.; Yoshihara, K.; Goethals, Mieke; Hermans, Jan (2009) -
Latest cluster performance for EUV lithography
Shite, Hideo; Matsunaga, Koichi; Nafus, Kathleen; Kosugi, H.; Foubert, Philippe; Hermans, Jan; Hendrickx, Eric; Goethals, Mieke; Van Den Heuvel, Dieter (2012)