Publication:

Further investigation of EUV process sensitivities for wafer track processing

Date

2010

Proceedings Paper

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Files

20786.pdf 1.91 MB

Author(s)

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Nafus, Kathleen

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Goethals, Mieke

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Hendrickx, Eric

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Baudemprez, Bart

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Van Den Heuvel, Dieter

Metrics

1937 since deposited on 2021-10-18

Acq. date: 2026-01-11