Browsing by author "Fonda, Emiliano"
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Study of deposition behavior of thermal/plasma-enhanced chemical vapor deposition (CVD/PECVD) of manganese on porous SiCOH low-k dielectric materials for copper diffusion barrier application in advanced interconnect technology
Jourdan, Nicolas; Baklanov, Mikhaïl; Meersschaut, Johan; Vereecke, Guy; Conard, Thierry; Wilson, Chris; Ablett, James; Fonda, Emiliano; Geypen, Jef; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt (2012)