Browsing by author "Wen, Liangong"

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A parylene temporary packaging technique for MEMS wafer handling

Wen, Liangong; Wouters, K.; Ceyssens, F.; Witvrouw, Ann; Puers, Bob (2011)
Thin film encapsulated SiGe accelerometer for MEMS above IC integration

Wen, Liangong; Guo, Bin; Haspeslagh, Luc; Severi, Simone; Witvrouw, Ann; Puers, Bob (2011)