Publication:
Thin film encapsulated SiGe accelerometer for MEMS above IC integration
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1865 since deposited on 2021-10-19
1last month
Acq. date: 2026-01-11
Citations
Metrics
Views
1865 since deposited on 2021-10-19
1last month
Acq. date: 2026-01-11
Citations