Browsing by author "Koudriavtsev, I"

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Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films

Godavarthi, Srinivas; Wang, Cong; Verdonck, Patrick; Matsumoto, Y.; Koudriavtsev, I; Dutt, A.; Tielens, Hilde; Baklanov, Mikhaïl (2015)
Study of porogen removal by HWCVD for the fabrication of advanced low-k films

Godavarthi, Srinivas; Wang, Cong; Verdonck, Patrick; Matsumoto, Yasuhiro; Koudriavtsev, I; Tielens, Hilde; Baklanov, Mikhaïl (2012)