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Study of porogen removal by HWCVD for the fabrication of advanced low-k films
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Authors
Godavarthi, Srinivas
;
Wang, Cong
;
Verdonck, Patrick
;
Matsumoto, Yasuhiro
;
Koudriavtsev, I
;
Tielens, Hilde
;
Baklanov, Mikhaïl
Conference
7th International Conference on Hot- Wire Chemical Vapor deposition - Cat-CVD
Title
Study of porogen removal by HWCVD for the fabrication of advanced low-k films
Publication type
Meeting abstract
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