Publication:

Study of porogen removal by HWCVD for the fabrication of advanced low-k films

Date

2012

Meeting abstract

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Author(s)

Godavarthi, Srinivas

;

;

Verdonck, Patrick

;

Matsumoto, Yasuhiro

;

Koudriavtsev, I

;

;

Baklanov, Mikhaïl

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Acq. date: 2026-02-24