Browsing by author "Lalovic, Ivan"
Now showing items 1-5 of 5
-
Effect of laser bandwidth tuning on line/space and contact printing at 1.35NA
Van Look, Lieve; Bekaert, Joost; Vandenberghe, Geert; Lalovic, Ivan; Farrar, Nigel (2008) -
Impact of finite laser bandwidth on the critical dimension of L/S structures
De Bisschop, Peter; Lalovic, Ivan; Trintchouk, Fedor (2008) -
Improving on-wafer CD correlation analysis using advanced diagnostics and across-wafer light-source monitoring
Alagna, Paolo; Zurita, Omar; Rechtsteiner, Greg; Lalovic, Ivan; Bekaert, Joost (2014) -
Lithography imaging control by enhanced monitoring of light source performance
Alagna, Paolo; Zurita, Omar; Lalovic, Ivan; Seong, Nakgeuon; Rechsteiner, Gregory; Thornes, Joshua; D'have, Koen; Van Look, Lieve; Bekaert, Joost (2013) -
Modeling laser bandwidth for OPC applications
Zuniga, Christian; Adam, Kostas; Lam, Michael; Lalovic, Ivan; De Bisschop, Peter (2009)