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Impact of finite laser bandwidth on the critical dimension of L/S structures
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Authors
De Bisschop, Peter
;
Lalovic, Ivan
;
Trintchouk, Fedor
Issue
3
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
7
Title
Impact of finite laser bandwidth on the critical dimension of L/S structures
Publication type
Journal article
Embargo date
9999-12-31
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